Abstract:The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. It is shown that for the considered magnetic field topology the electron current flows through different channels in the (r, z) plane: a ``transverse'' one, which involves current flow through the electrons' magnetic confinement region (EMCR) above the racetrack, and two ''longitudinal'' ones. Electrons gain energy from the electric field along these channels following various mechanisms, which are rather distinct from those sustaining dc-powered magnetrons. The longitudinal power absorption involves mirror-effect heating (MEH), nonlinear electron resonance heating (NERH), magnetized bounce heating (MBH), and the heating by the ambipolar field at the sheath-presheath interface. The MEH and MBH represent two new mechanisms missing from the previous literature. The MEH is caused by a reversed electric field needed to overcome the mirror force generated in a nonuniform magnetic field to ensure sufficient flux of electrons to the powered electrode, and the MBH is related to a possibility for an electron to undergo multiple reflections from the expanding sheath in the longitudinal channels connected by the arc-like magnetic field. The electron heating in the transverse channel is caused mostly by the essentially collisionless Hall heating in the EMCR above the racetrack, generating a strong ExB azimuthal drift velocity. The latter mechanism results in an efficient electron energization, i.e., energy transfer from the electric field to electrons in the inelastic range. Since the main electron population energized by this mechanism remains confined within the discharge for a long time, its contribution to the ionization processes is dominant.

Coherent High-Frequency Axial Oscillations in a Partially Magnetized Direct Current Magnetron Discharge

Coherent high-frequency axial oscillations in a partially magnetized direct current magnetron discharge

Low frequency oscillations in a plasma with spatially variable field-aligned flow

Observation of rotating magnetohydrodynamic modes in the plume of a high-current hollow cathode

Helicon waves in a converging-diverging magnetoplasma

Modulation of uniform magnetic field on electron dynamics in low‐pressure capacitively coupled plasmas

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Observation of low-frequency oscillation in argon helicon discharge

Resonant Plasma Heating below the Cyclotron Frequency

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Discharge properties of a magnetized cylindrical capacitively coupled plasma discharge

A systematic investigation of electric field nonlinearity and field reversal in low pressure capacitive discharges driven by sawtooth-like waveforms

Low-pressure Planar Magnetron Discharge for Surface Deposition and Nanofabrication

Nonlinear Dynamics of Fluctuations in the Presence of Sheared Parallel and Perpendicular Flows in a Magnetized Laboratory Plasma

Electric field filamentation and higher harmonic generation in a very high frequency capacitive discharges

Particle-In-Cell simulations of filamentation process in magnetized plasma of capacitively-coupled radio-frequency discharge

Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

Cascades of Parametric Instabilities in the Tokamak Plasma Edge during Electron Cyclotron Resonance Heating

Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges

Characterization of fast magnetosonic waves driven by compact toroid plasma injection along a magnetic field