Laser Patterning of Large-scale Perovskite Single-Crystal-Based Arrays for Single-Mode Laser Displays

Wangqi Mao,Haonan Li,Bing Tang,Chi Zhang,Liang Liu,Pei Wang,Hongxing Dong,Long Zhang

DOI: https://doi.org/10.1088/2631-7990/acf2d0

2023-08-23

International Journal of Extreme Manufacturing

Abstract:To achieve excellent single-mode micro/nanolaser arrays, mass-scale top-down manufacturing of highly repeatable and high-performance micro/nanolasers is required. This study demonstrates a novel method for laser patterning of reproducible perovskite single-crystal-based microlaser arrays by preparing large-scale, highly crystalline perovskite single-crystal films using the chemical vapor deposition method. Perovskite materials were directly ablated by femtosecond-laser in multiple low-power cycles at a minimum machining line width of approximately 300 nm to realize high-precision, chemically clean, and repeatable fabrication of microdisk arrays. The surface impurities generated during the process can be washed away to avoid external optical loss owing to the robustness of the single-crystal film. Moreover, the high-quality, large-sized perovskite single-crystal films can significantly improve the quality of microcavities, thereby realizing a perovskite microdisk laser with narrow linewidth (0.09 nm) and low threshold (5.1 μJ/cm 2 ). The possibility of using single-mode microlasers as pixels to ensure the power and high color purity of the laser display was demonstrated. Thus, the compact microlaser arrays produced by these efficient techniques may provide a versatile platform for next-generation integrated photonics.

engineering, manufacturing,materials science, multidisciplinary