Abstract:Refractive index sensors based on metal metasurfaces are commonly limited by their low quality factors due to significant Ohmic losses in the metal material. In contrast, sensors based on all-dielectric metasurfaces can overcome this disadvantage. Currently, all-dielectric metesurface sensors based on symmetry-protected bound states in the continuum (BIC) have aroused intense research interests due to their ability in achieving ultrahigh quality factors. Such metesurface sensors are mainly based on single BIC and single forms of symmetry breaking. There are few studies on metasurface sensors of multiple BICs and multiple forms of symmetry breaking. In additon, the refractive-index sensors commonly neglect the impact of temperature fluctuations and thus suffer from the crosstalk between the refractive index and temperature of the environment. In this paper, an all-dielectric metasurface composed of a periodic array of asymmetric semicircular-cylinder pairs is designed and two quasi-bound states in the continuum (QBIC) with high quality factors are obtained. By choosing three different forms of symmetry breaking (two in-plane and one out-of-plane), two robust QBIC modes can be generated in the selected near-infrared frequency band, and their resonance wavelengths, quality factors and polarization dependences exhibit different characteristics. Full-wave simulation results show that by measuring the resonance wavelengths of the two QBICs (denoted by QBIC1 and QBIC2), two-parameter sensing of refractive index and temperature can be achieved, which then solves the issue of crosstalk between the refractive index and temperature of the environment in refractive-index sensing. The dependence of quality factors on asymmetric parameters follows an inverse quadratic relation for the two QBICs. By adjusting the asymmetric parameters, the quality factor can be theoretially increased to any value, so that the sensing performance can be improved and adjusted. For refractive-index sensing, the QBIC1 can achieve a sensitivity of 194.7 nm/RIU and a highest figure of merit ( FOM ) of 8197 (corresponding to a quality factor of 45829); the QBIC2 can achieve a sensitivity of 170 nm/RIU, and a highest FOM of 4970 (corresponding to a quality factor of 28097). For temperature sensing, the QBIC1 can achieve a sensitivity of 7.77 pm/°C, and the QBIC2 can achieve a sensitivity of 24 pm/°C.

All-Dielectric Metasurface Refractive Index Sensor with High Figure of Merit Based on Quasi-Bound States in the Continuum

High FOM Refractive Index Sensor Based on Quasi-Bound States in the Continuum of Tri-Prism Metasurface

Metasurface with WS2 Based on Quasi-Bound States in the Continuums for Refractive Index Sensing

All-dielectric Metasurface Two-Parameter Sensor Based on Quasi-Bound States in Continuum

All-dielectric Metasurface with Multiple Fano Resonances Supporting High-Performance Refractive Index Sensing

All-dielectric metasurface two-parameter sensor based on quasi-bound states in the continuum

Refractive index sensor based on bound states in the continuum in silicon-based metasurface

High-Sensitivity Sensing in All-Dielectric Metasurface Driven by Quasi-Bound States in the Continuum

Potential of high Q dual band Mid-Infrared metasurfaces with Quasi-BIC for refractive index sensing

Ultra-sensitive Refractive Index Sensor Based on Quasi-Bic Formed in Rectangular-Split Solid-Ring Metasurface with Thin Film Lithium Niobate

High Q-factor Fano Resonances Driven by Quasi Bound State in the Continuum Based on All-Dielectric Metasurface

All-Dielectric Metasurface Refractive Index Sensor with Microfluidics

All-Dielectric Metasurface Based on Complementary Split-Ring Resonators for Refractive Index Sensing

Dual-resonance sensing for environmental refractive index based on quasi-BIC states in all-dielectric metasurface

Dual high-Q Fano resonances metasurfaces excited by asymmetric dielectric rods for refractive index sensing

Terahertz Metasurfaces Based on Bound States in the Continuum (BIC) for High-Sensitivity Refractive Index Sensing

High-Sensitivity Optical Sensors Empowered by Quasi-Bound States in the Continuum in a Hybrid Metal-Dielectric Metasurface

Phase Interrogation Sensor Based on All-Dielectric BIC Metasurface

All-dielectric Metasurfaces with High Q-factor Fano Resonances Enabling Multi-Scenario Sensing

Optimization of the Geometrical Design for an All-Dielectric Metasurface Sensor with a High Refractive-Index Response

An all-dielectric metasurface based on Fano resonance with tunable dual-peak insensitive polarization for high-performance refractive index sensing