Abstract:Refractive index sensors based on metal metasurfaces are commonly limited by their low quality factors due to significant Ohmic losses in the metal material. In contrast, sensors based on all-dielectric metasurfaces can overcome this disadvantage. Currently, all-dielectric metesurface sensors based on symmetry-protected bound states in the continuum (BIC) have aroused intense research interests due to their ability in achieving ultrahigh quality factors. Such metesurface sensors are mainly based on single BIC and single forms of symmetry breaking. There are few studies on metasurface sensors of multiple BICs and multiple forms of symmetry breaking. In additon, the refractive-index sensors commonly neglect the impact of temperature fluctuations and thus suffer from the crosstalk between the refractive index and temperature of the environment. In this paper, an all-dielectric metasurface composed of a periodic array of asymmetric semicircular-cylinder pairs is designed and two quasi-bound states in the continuum (QBIC) with high quality factors are obtained. By choosing three different forms of symmetry breaking (two in-plane and one out-of-plane), two robust QBIC modes can be generated in the selected near-infrared frequency band, and their resonance wavelengths, quality factors and polarization dependences exhibit different characteristics. Full-wave simulation results show that by measuring the resonance wavelengths of the two QBICs (denoted by QBIC1 and QBIC2), two-parameter sensing of refractive index and temperature can be achieved, which then solves the issue of crosstalk between the refractive index and temperature of the environment in refractive-index sensing. The dependence of quality factors on asymmetric parameters follows an inverse quadratic relation for the two QBICs. By adjusting the asymmetric parameters, the quality factor can be theoretially increased to any value, so that the sensing performance can be improved and adjusted. For refractive-index sensing, the QBIC1 can achieve a sensitivity of 194.7 nm/RIU and a highest figure of merit ( FOM ) of 8197 (corresponding to a quality factor of 45829); the QBIC2 can achieve a sensitivity of 170 nm/RIU, and a highest FOM of 4970 (corresponding to a quality factor of 28097). For temperature sensing, the QBIC1 can achieve a sensitivity of 7.77 pm/°C, and the QBIC2 can achieve a sensitivity of 24 pm/°C.

Ultra-sensitive Refractive Index Sensor Based on Quasi-Bic Formed in Rectangular-Split Solid-Ring Metasurface with Thin Film Lithium Niobate

All-Dielectric Metasurface Refractive Index Sensor with High Figure of Merit Based on Quasi-Bound States in the Continuum

Potential of high Q dual band Mid-Infrared metasurfaces with Quasi-BIC for refractive index sensing

Ultrasensitive Refractive Index Sensing Based on the Quasi‐Bound States in the Continuum of All‐Dielectric Metasurfaces

Refractive index sensor based on bound states in the continuum in silicon-based metasurface

All-Dielectric Metasurface Based on Complementary Split-Ring Resonators for Refractive Index Sensing

High-Sensitivity Sensing in All-Dielectric Metasurface Driven by Quasi-Bound States in the Continuum

Dual high-Q Fano resonances metasurfaces excited by asymmetric dielectric rods for refractive index sensing

All-Dielectric Metasurface Refractive Index Sensor with Microfluidics

All-dielectric metasurface two-parameter sensor based on quasi-bound states in the continuum

Performance analysis and optimization of high Q-factor toroidal resonance refractive index sensor based on all-dielectric metasurface

Mid-infrared high performance dual-Fano resonances based on all-dielectric metasurface for refractive index and gas sensing

High-Performance All-Dielectric Metasurface for Quadruple Fano Resonance-Induced Biosensing Applications in the Near-Infrared Range

Refractive index sensor based on fano-magnetic toroidal quadrupole resonance enabled by bound state in the continuum in all-dielectric metasurface

Multiple fano resonances based on all-dielectric metastructure for refractive index sensing

Dual-resonance sensing for environmental refractive index based on quasi-BIC states in all-dielectric metasurface

Refractive index sensing using quasi-bound states in the continuum in silicon metasurfaces

High-Q-factor multiple Fano resonance for sensitive refractive index sensors based on all-dielectric metasurface

Ultra-high Q-factor toroidal dipole resonance and magnetic dipole quasi-bound state in the continuum in an all-dielectric hollow metasurface

A High-Performance Refractive Index Sensor Based on Fano Resonance in Si Split-Ring Metasurface

High-Performance Refractive Index and Temperature Sensing Based on Toroidal Dipole in All-Dielectric Metasurface