In2O3 Decorated Co32 Cluster for High Performance H2S MEMS Sensors

Chengzhi Zhang,Yanan Liu,Chen Wang,Jiaqiang Xu,Yue-Ling Bai
DOI: https://doi.org/10.1016/j.inoche.2023.111256
IF: 3.428
2023-08-01
Inorganic Chemistry Communications
Abstract:Hydrogen sulfide is a toxic gas, which can cause air pollution and lead to the damage of human health, so real-time monitoring of H2S has become a hot topic in recent years. In this work, the Co32 nanocluster was successfully prepared by a hydrothermal method and its derivatives In2O3/Co32(1–5 wt%) were obtained with different In2O3 contents. The Micro-Electro-Mechanical System (MEMS) sensors based on Co32 cluster and In2O3/Co32-1, 3, 5 were proved to be featured with low working temperature (160–185 °C), good selectivity, sensitivity and stability for H2S detection, especially the In2O3/Co32-3 sample with the highest response to H2S. Its optimized gas sensing performance compared with Co32 clusters may be attributed to the increase of chemisorption oxygen on the surface of the In2O3/Co32-3. This work provides a possibility of cobalt cluster and its derivatives based materials for highly selective H2S gas sensor.
chemistry, inorganic & nuclear
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