Abstract:Microsupercapacitors (MSCs) are attractive energy devices for applications in IoT, wireless sensors, and other microelectronic systems due to their small footprints. In this work, the dimensional scaling of fully-integrated additively-fabricated MSCs is systematically investigated. The dimensions of the MSCs are scaled by varying the length and cross-section of their electrodes to study their scalability to the mm 3 range, making them attractive for even chip-scale embedding. MSCs with the thickest electrodes demonstrate the highest values of capacitance and energy density, while MSCs with the thinnest electrodes show lower capacitance and energy densities, but deliver higher power densities. We observe that as expected, capacitance scales with dimensions. We observe excellent performance levels, including maximum areal capacitance of ∼731.7 mF cm −2 , areal energy density of ∼36.59 μW h cm −2 , areal power density of ∼2669.8 mW cm −2 , and ∼95% capacitance retention after 17 000 cycles. These MSCs also show maximum volumetric capacitance, volumetric energy density, and volumetric power density of 8.7 F cm −3 , 0.436 mW h cm −3 , and 31.78 W cm −3 , respectively. Overall, these are the highest values reported to date for such systems. These results are achieved by utilizing novel chemistries for the components of the MSCs and from tuning their geometry. The electrodes of the MSCs are formed from a nanocomposite of edge-oxidized graphite oxide (EOGO)/cerium oxide nanoparticles to benefit from both electrical double-layer capacitance (EDLC) and pseudocapacitance, the electrolyte is a UV-curable hydrogel based on (poly(ethylene glycol) diacrylate (PEGDA) + LiCl + lithium phenyl-2,4,6-trimethylbenzoylphosphinate (LAP) + water), and the current collector is a silver paste. These MSCs are fully packaged and sealed by 3D printing a package using polycaprolactone (PCL) and depositing a UV-curable resin-based encapsulant. Our findings demonstrate that such devices can be scaled to mm 3 volumes while continuing to deliver excellent performance, making them attractive candidates for a range of embedded energy storage applications.

Laser-Directed Energy Deposition to Achieve High-Aspect-Ratio Micropillar Arrays for 3D Interdigitated Microsupercapacitors

Silicon-nanoforest-based solvent-free micro-supercapacitors with ultrahigh spatial resolution <i>via</i> IC-compatible <i>in situ</i> fabrication for on-chip energy storage

Tuning the Mechanical and Electrical Properties of Porous Electrodes for Architecting 3D Microsupercapacitors with Batteries‐Level Energy

Laser-assisted One-Step Fabrication of Interlayer-Spacing-regulated Three-Dimensional MXene-based Micro-Supercapacitors

Advanced Three-Dimensional Microelectrode Architecture Design for High-Performance On-Chip Micro-Supercapacitors

Printing Pillar Array Structure of Electrodes Facilitating Ion Diffusion and Electron Transport for High-Performance Asymmetric Microsupercapacitors

3D printing of high-performance micro-supercapacitors with patterned exfoliated graphene/carbon nanotube/silver nanowire electrodes

Three-Dimensional Micro/Nano-interconnected Scaffold Graphene-Based Micro-Supercapacitors with High Electrochemical Performance

Scalable Fabrication of High-Performance Micro-Supercapacitors by Embedding Thick Interdigital Microelectrodes into Microcavities

Ordered porous and uniform electric-field-strength micro-supercapacitors by 3D printing based on liquid-crystal V2O5 nanowires compositing carbon nanomaterials

High Areal Energy 3D‐Interdigitated Micro‐Supercapacitors in Aqueous and Ionic Liquid Electrolytes

Laser-Assisted Multiscale Fabrication of Configuration-Editable Supercapacitors with High Energy Density

3D Printable Ink for Double-Electrical-layer-enhanced Electrode of Microsupercapaitors

Aqueous high-voltage all 3D-printed micro-supercapacitors with ultrahigh areal capacitance and energy density

A Laser-Processed Carbon-Titanium Carbide Heterostructure Electrode for High-Frequency Micro-Supercapacitors

Co3O4 Quantum Dots Intercalation Liquid‐Crystal Ordered‐Layered‐Structure Optimizing the Performance of 3D‐Printing Micro‐Supercapacitors

Three‐Dimensional VTe2/MXene/CNT Ternary Architectures for the Development of High Performance Microsupercapacitors

Three dimensional high-performance micro-supercapacitors with switchable high power density and high energy density

Sub-mm3 dimensional scaling of fully-integrated additively-fabricated microsupercapacitors for embedded energy storage applications

High-Performance All-solid-state microsupercapacitors from 3D printing Structure-engineered Graphene-Carbon sphere electrodes

A Conformal Active-Material Loading Strategy for Designing High-Performance Planar Microsupercapacitors