Fabrication of integrated all-solid titanium dioxide and silver/silver chloride electrodes for facile pH electrochemical detection via extended-gate field effect transistor transducing method

Shaiful Bakhtiar Hashim,Nur Syahirah Kamarozaman,Norhidayatul Hikmee Mahzan,Nurbaya Zainal,Aimi Bazilah Rosli,Sukreen Hana Herman,Zurita Zulkifli
DOI: https://doi.org/10.1007/s10854-023-10852-6
2023-06-30
Abstract:An integrated all-solid electrode (IASE) consisting of a solid-state silver/silver chloride (Ag/AgCl) reference electrode (RE) and titanium dioxide (TiO 2 ) sensing electrode (SE) on a single indium tin oxide (ITO) substrate was successfully fabricated for an extended-gate field effect transistor (EGFET) pH sensor. Two different sizes of ITO substrate (2 cm × 2 cm and 1 cm × 2 cm) were used to fabricate the TiO 2 SE using the sol–gel spin-coating method with an area of 0.75 and 0.35 cm 2 , respectively. In contrast, the RE part was fabricated using thermal evaporation. X-ray photoelectron spectroscopy and energy dispersive X-ray spectroscopy were used to investigate the composition of TiO 2 and Ag/AgCl thin film. The IASE performance was then evaluated in terms of sensor sensitivity and linearity by applying it to an EGFET pH sensor setup and compared with commercialized Ag/AgCl RE. It was found that the sensor sensitivity and linearity for IASE are comparable, if not better than the EGFET setup using the commercialized RE. The sensitivity for IASE-EGFET was 67.8 mV/pH for the size of 2 cm × 2 cm ITO substrate, and that of 1 cm × 2 cm was 52.8 mV/pH, while the sensitivity setup with commercialized RE was 54.3 mV/pH.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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