Nanoporous Metal–Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Jenna Multia,Dmitry E. Kravchenko,Anish Philip,Rob Ameloot,Maarit Karppinen,Víctor Rubio-Giménez
DOI: https://doi.org/10.1021/acsanm.2c04934
IF: 6.14
2023-01-10
ACS Applied Nano Materials
Abstract:Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal-organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.
materials science, multidisciplinary,nanoscience & nanotechnology
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