Vapor‐phase synthesis of MOF films

Myeonggeun Choe,Hyeonwoo Lee,Hee Cheul Choi
DOI: https://doi.org/10.1002/bkcs.12854
2024-06-20
Bulletin of the Korean Chemical Society
Abstract:This review highlights two leading vapor‐phase synthesis techniques for metal–organic framework (MOF) thin films: molecular layer deposition (MLD) and chemical vapor deposition (CVD). Fabrication of thin films is the most crucial step in introducing promising new materials into practical devices. Among the various materials, metal–organic framework (MOF) thin films have gained widespread attention with the advantage of diverse applications. In this review, two representative vapor‐phase synthetic methods, (1) molecular layer deposition (MLD), (2) chemical vapor deposition (CVD) are addressed as emerging techniques.
chemistry, multidisciplinary
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