Energy transfer and patterning characteristics in pulsed-laser subtractive manufacturing of single layer of MoS 2

Zifeng Wang,Zheng Huang,Nan Lu,Jie Guan,Yaowu Hu

DOI: https://doi.org/10.1016/j.ijheatmasstransfer.2023.123873

IF: 5.2

2023-01-24

International Journal of Heat and Mass Transfer

Abstract:The single-layer Molybdenum disulfide (MoS 2 ) was subtracted by using pulsed lasers with different parameters. The machining results were tested by optical microscopy, Raman spectrum, photoluminescent (PL) spectrum, scanning electron microscopy (SEM), and atomic force microscopy (AFM), indicating that the femtosecond laser machining has a better boundary effect than the nanosecond laser. Molecular dynamics (MD) were used to simulate the subtractive manufacturing effect and thermal transfer under different pulse widths and energy conditions. It has been proved that the short-width pulsed laser is more suitable for patterning MoS 2 . During the MD simulation, wrinkles and defects were found during the laser machining of long-width pulsed laser. The band structure of MoS 2 was calculated by density functional theory (DFT) to investigate the effect of different wrinkle and defect conditions on the nonlinear laser absorption. The effect of defects on MoS 2 thermal transfer was explored by plasma construction defects. The energy transfer during long-width pulsed laser machining was obtained. This work provides fundamental understanding of laser patterning and machining of MoS 2 for future device applications.

engineering, mechanical,thermodynamics,mechanics