Capacitive-piezoresistive hybrid flexible pressure sensor based on conductive micropillar arrays with high sensitivity over a wide dynamic range
Zhiran Shen,Chengduan Yang,Chuanjie Yao,Ziqi Liu,Xinshuo Huang,Zhengjie Liu,Jingshan Mo,Huihua Xu,Gen He,Jun Tao,Xi Xie,Tian Hang,Hui-Jiuan Chen,Fanmao Liu
DOI: https://doi.org/10.1039/d2mh00892k
IF: 13.3
2022-11-09
Materials Horizons
Abstract:The flexible pressure sensor is the foundation of wearable / implantable biosensing and human-machine interface, which mainly consists of the piezoresistive, capacitive, piezoelectric, and triboelectric types. As each type of sensors exhibits different electro-mechanical behaviors, it is challenging to detect various physiological mechanical signals range in large pressure scope via a certain sensor configuration, or even a single type of sensors. Here we report a capacitive-piezoresistive hybrid flexible pressure sensor based on face-to-face mounted conductive micropillar arrays, as a solution to the challenge. The sensor exhibited high sensitivity over a wide dynamic range by 5 orders of magnitude, covering almost the full range of physiological mechanical signals. The process of fabricating large-scale and morphology-homogeneous conductive micropillar arrays was developed and refined first. This track-etched-membrane based process provides a facile, cost-effective, and highly flexible way to precisely adjust the morphology, modulus, conductivity of micropillars according to application requirements. Afterwards, the conductive micropillar arrays based pressure sensors (MAPS) were developed and optimized for attaining all-round sensing performance. The pillar-contacting behaviors generated significant variations in both the capacitance and resistance of the MAPS at low pressure regime (10−4 – 0.2 kPa), bringing high sensitivity in both capacitive and piezoresistive working modes. The pillars' vertical contacting, bending and thickening under medium pressure (0.2 kPa – 16 kPa) led to continuous linear response in both modes. The configuration and optimization enabled the MAPS to detect acoustic pressure (< 1 Pa), milligram weight, soft touch (< 1 kPa), arterial pulses (1 – 16 kPa preload), joint motions and plantar pressure (~ 100 kPa), and the hybrid sensing mode allows the MAPS to work in a desirable way. In this work, the piezoresistive mode was mainly employed for higher accuracy and sampling rate, and it can apparently simplify IC design for wearable applications. The circuit converts the resistive variations into electrical signals via voltage division method, and directly readouts the signals after further amplifying, filtering and transmission. The improved facile and high adjustable fabrication process, and flexible hybrid sensing strategy benefit the unified design, batch production, quantifiable optimization, and functional diversity of wearable / implantable bioelectronics.
materials science, multidisciplinary,chemistry