Design of Lithography Machine Control System Based on DSP and FPGA

Dongyang Wu,Qin Yin
DOI: https://doi.org/10.1109/MACE.2012.631
2012-07-27
Abstract:In order to improve the efficiency in the production of large-size laser anti-counterfeit trademark holographic motherboard, the development of industrial control computer to the host computer and DSP TMS320F2812 lower the machine's high-speed lithography. The lithography machine with linear motor driven XY table, the dynamic exposure of the work, to achieve high-speed high-precision positioning. Solve the traditional lithography exposure mode in the stationary state, so that the lithography speed increased by 10 times to solve the difficult production of anti-counterfeiting trademark of the large-size problems, and improve the technical level of production of laser anti-counterfeit trademark.
Computer Science,Engineering
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