Abstract:The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices, including low-voltage, high-speed modulators, electro-optic frequency combs, and microwave-optical transducers. Yet to date, LiNbO3 photonic integrated circuits (PICs) have mostly been fabricated using non-standard etching techniques that lack the reproducibility routinely achieved in silicon photonics. Widespread future application of thin-film LiNbO3 requires a reliable and scalable solution using standard processing and precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform that overcomes the abovementioned challenges by employing wafer-scale bonding of thin-film LiNbO3 to planarized low-loss silicon nitride (Si3N4) photonic integrated circuits, a mature foundry-grade integrated photonic platform. The resulting devices combine the substantial Pockels effect of LiNbO3 with the scalability, high-yield, and complexity of the underlying Si3N4 PICs. Importantly, the platform maintains the low propagation loss (<0.1 dB/cm) and efficient fiber-to-chip coupling (<2.5 dB per facet) of the Si3N4 waveguides. We find that ten transitions between a mode confined in the Si3N4 PIC and the hybrid LiNbO$_3$ mode produce less than 0.8 dB additional loss, corresponding to a loss per transition not exceeding 0.1 dB. These nearly lossless adiabatic transitions thus link the low-loss passive Si3N4 photonic structures with electro-optic components. We demonstrate high-Q microresonators, optical splitters, electrically tunable photonic dimers, electro-optic frequency combs, and carrier-envelope phase detection of a femtosecond laser on the same platform, thus providing a reliable and foundry-ready solution to low-loss and complex LiNbO3 integrated photonic circuits.

Chip-Based Lithium-Niobate Frequency Combs

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Monolithic lithium niobate photonic circuits for Kerr frequency comb generation and modulation

Nonlinear wave mixing in lithium niobate thin film

Visible-to-ultraviolet frequency comb generation in lithium niobate nanophotonic waveguides

On-chip Lithium Niobate Microresonators for Photonics Applications

Visible to Ultraviolet Frequency Comb Generation in Lithium Niobate Nanophotonic Waveguides

Advances in on-chip photonic devices based on lithium niobate on insulator

Efficient parametric frequency conversions in lithium niobate nanophotonic chips

Heterogeneously Integrated Lithium Niobate on Insulator Chip for Frequency Up-Conversion and Detection

Monolithic photonic circuits for Kerr frequency comb generation, filtering and modulation

Broadband optical frequency comb generation in lithium niobate microring resonator by dispersion engineering

Integrated Lithium Niobate Platform for Nonlinear Optics and Electro-Optic Applications

Optimizing the Efficiency of a Periodically Poled LNOI Waveguide Using in Situ Monitoring of the Ferroelectric Domains

Raman lasing and soliton mode-locking in lithium niobate microresonators

A power-efficient integrated lithium niobate electro-optic comb generator

A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

High-efficiency and broadband on-chip electro-optic frequency comb generators