Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure

Timur Nikolaevich Terentev,Aleksandr Shemakhin,Ekaterina Sergeevna Samsonova,Viktor Semenovich Zheltukhin
DOI: https://doi.org/10.1088/1361-6595/ac8dba
2022-09-01
Plasma Sources Science and Technology
Abstract:The dependence of parameters of an inductively coupled RF plasma on the electromagnetic field frequency at reduced pressure (113 Pa) is studied. The study was carried out in a 2D axisymmetric time-dependent setting, implemented in the Comsol multiphysics software package using the Navier-Stokes equations, continuity equation for electron density, electron energy density equation, heat transfer equation, Maxwell and Poisson equations for electromagnetic fields. The distributions of the electron density, carrier gas temperature, electron temperature and ion density at the output of the discharge tube in dependence on electromagnetic field frequency are obtained.
physics, fluids & plasmas
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