Abstract:In this work, we present the results of simulations carried out for N2-H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3-0.9 mbar), low power (5-20 W), and for amounts of H2 up to 5 pct. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and electronic excited states, and contains a detailed surface chemistry that includes recombination processes and the production of NHx molecules. The results obtained highlight the relevance of the interactions between plasma and surface, given the role of the secondary electron emission in the electrical parameters of the discharge and the critical importance of the surface production of ammonia to the neutral and ionic chemistry of the discharge.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the influence of plasma - surface interactions on the discharge characteristics and chemical reaction processes in the capacitively - coupled radio - frequency discharge (CCP discharge) of the nitrogen - hydrogen mixed gas (N2 - H2) at low pressure. Specifically, the research focuses on the following aspects: 1. **Importance of plasma - surface interactions**: Through simulating experimental data, the interactions between the plasma and the surface are explored, especially the role of secondary electron emission in the electrical parameters of the discharge and the important influence of ammonia generated on the surface on neutral and ionic chemistry. 2. **Ammonia generation mechanism**: The catalytic effects of different materials (such as stainless steel, iron or platinum) on ammonia generation are studied, and how these materials affect the ammonia generation during the discharge process. In addition, the heterogeneous chemical processes of ammonia generation are also explored, especially the ammonia synthesis on the reactor wall. 3. **Discharge characteristics**: The variation laws of the electrical parameters of the discharge (such as electron density, self - bias voltage, etc.) with the coupling power and pressure are analyzed, and the accuracy of the model is verified. 4. **Chemical reaction kinetics**: The generation and loss rates of various neutral and ionic species during the discharge process are described in detail, as well as the chemical reaction paths of these species, especially the ammonia generation process. Through these studies, the author aims to deeply understand the complex behavior of the N2 - H2 plasma at low pressure and provide theoretical support and technical guidance for plasma - assisted ammonia synthesis and other related applications.

N2-H2 capacitively coupled radio-frequency discharges at low pressure. Part II. Modelling results: the relevance of plasma-surface interaction

N2-H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation

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