Direct synthesis of moiré superlattice through chemical vapor deposition growth of monolayer WS2 on plasma-treated HOPG

Xiaowen Zhou,Zongnan Zhang,Xinlong Zeng,Yaping Wu,Feiya Xu,Chunmiao Zhang,Xu Li,Zhiming Wu,Junyong Kang
DOI: https://doi.org/10.1007/s12274-022-4487-z
IF: 9.9
2022-07-10
Nano Research
Abstract:Vertical van der Waals (vdW) heterostructures composed of two-dimensional (2D) layered materials have recently attracted substantial interests due to their unique properties. However, the direct synthesis of moiré superlattice remains a great challenge due to the difficulties in heterogeneous nucleation on smooth vdW surfaces. Here, we report a controllable chemical vapor deposition growth of complete monolayer WS 2 on highly ordered pyrolytic graphite (HOPG) substrates through the plasma pretreatment. The results show that the morphologies of the grown WS 2 have a strong dependence on the plasma parameters, including gas composition, source power, and treatment time. It is found that the surface C-C bonds are broken in the plasma pretreated HOPG, and the formed small clusters can act as the nucleation sites for the subsequent growth of WS 2 . Moreover, the height of clusters dominates the growth mode of WS 2 islands. A transition from a 2D mode to three-dimensional (3D) growth mode occurs when the height is higher than the interlayer spacing of the heterostructure. Besides, diverse moiré superlattices with different twist angles for WS 2 /HOPG heterostructures are observed, and the formation mechanism is further analyzed by first-principles calculations.
materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology
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