Abstract:Proceedings of the 14th International Conference, Taipei, Taiwan, 17th?21st June, 2013 Organized by: Center for Measurement Standards/Industrial Technology Research Institute Mechanical and Systems Research Laboratories/Industrial Technology Research Institute National Taiwan University National Cheng Kung University National Taiwan University of Science and Technology National Tsing Hua University Greetings from Chairman of International Programme Committee When Professor Ken Stout and I founded this series of conferences in the United Kingdom more than thirty years ago, we did not anticipate its longevity or its success. Since that first meeting at Leicester, the conference has been often held in England, but also in several other European countries: France, Poland and Sweden, as well as in the United States. Ken, sadly no longer with us, would be proud of what it has achieved and has come to represent. Generations of researchers have presented their new ideas and innovations here which are now embodied in many textbooks and international standards. But this conference in 2013 marks a new departure and perhaps a new future. For the first time it is being held in Asia, reflecting the historic rise of the economies of the Pacific Rim, adding modern technology to their long-existing traditions of ordered insight and precise craftsmanship. Many of you have travelled far to attend this meeting, and we hope you will feel your trouble has been rewarded. We have an excellent selection of papers from all over the world from many of the world's experts, embodying the consolidation of tested ideas as well as the latest advances in the subject. These will be set in context by a glittering array of keynote and invited speakers. On behalf of the International Programme Committee, I am glad to acknowledge the hard work of the members of the Local Organising Committee in putting the programme together and making all the arrangements, and to accept their hospitality. It is my privilege and pleasure to welcome you all to the 14th International Conference on Metrology and Properties of Engineering Surfaces here in Taipei. Tom Thomas Halmstad, 1st June 2013 Greetings from Chairman of Local Organizing Committee It is the great honor of Center for Measurement Standards (CMS), metrology group of Industrial Technology Research Institute (ITRI), to host the 14th International Conference on Metrology and Properties of Engineering Surfaces (Met & Props 2013) from 17?21 June, 2013, in Taipei, Taiwan. In collaboration with four local universities, National Taiwan University (NTU), National Cheng-Kung University (NCKU), National Taiwan University of Science and Technology (NTST) and National Tsing-Hua University (NTHU), we have spent more than one year to prepare this Conference since the approval by the International Programme Committee (IPC). With the guidance from the IPC, we are able to go through the laborious, but important, process of paper selection and review from more than 100 submissions, and also to maintain the tradition in gathering the high quality and state-of-the-art papers. Finally, more than 65 full papers are collected in the programme (oral and poster), and over 120 surface metrologists from 17 countries (or economies) will attend the Conference. As stated in the preface by Professor Thomas, this series of conferences were founded by Tom and late Professor Ken Stout in the United Kingdom more than thirty years ago. I was lucky to join Ken's research group in Birmingham, and to start my journey over surface metrology in 1989, under the financial support from ITRI. With the encouragement from Professor Liam Blunt and endeavors of my colleagues, we are able to hold the Conference first time in emerging Asia, and to ''carry on the heritage and pave the way to the future'' (a Chinese proverb) in surface metrology. Taiwan is also known as Formosa, from Portuguese Ilha Formosa, which means ''Beautiful Island''. Besides the inspiring scientific arrangements, I encourage you to taste Taiwan's wonderful gourmet cuisine, and to explore the beauty of the sweet-potato-shaped island. I wish you a joyful, fruitful and memorable stay. Victor TY Lin, PhD Chairman Local Organizing Committee Met & Props 2013 International Programme Committee Professor Mohamed El Mansori (Arts et Metiers ParisTech, France) Professor H Zahouani (Ecole Centrale de Lyon, France) Professor B-G Rosen (Halmstad University, Sweden) Professor Tom R Thomas (Halmstad University, Sweden) Professor Liam Blunt (University of Huddersfield, UK) Professor Richard Leach (National Physical Laboratory, UK) Professor Chris Brown (Worcester Polytechnic Institute, USA) Dr Jia-Ruey Duann (Center for Measurement Standards, ITRI, Taiwan) International Scientific Committee Professor H Zahouani (Ecole Centrale de Lyon, France) Dr Rolf Kr?ger-Sehm (Physikalisch-Technische Bundesanstalt, Germany) Professor Pawel Pawlus (Rzesz?w University of Technology, Poland) Professor B-G Rosen (Halmstad University, Sweden) Professor Tom R Thomas (Halmstad University, Sweden) Professor Liam Blunt (University of Huddersfield, UK) Professor Derek Chetwynd (University of Warwick, UK) Professor Jane Jiang (University of Huddersfield, UK) Professor Richard Leach (National Physical Laboratory, UK) Professor Paul Scott (University of Huddersfield, UK) Dr Andrew Yacoot (National Physical Laboratory, UK) Professor Chris Brown (Worcester Polytechnic Institute, USA) Dr Chris Evans (University of North Carolina at Charlotte, USA) Professor Jay Raja (University of North Carolina at Charlotte, USA) Dr Ted Vorburger (National Institute of Standards and Technology, USA) Dr Andrew Baker (National Measurement Institute, Australia) Professor David Lee Butler (Nanyang Technological University, Singapore) Dr Benny Cheung (The Hong Kong Polytechnic University, China) Professor Yetai Fei (Hefei University of Technology, China) Dr Kazuya Naoi (National Metrology Institute of Japan, Japan) Dr Heui-Jae Pahk (SNU Precision Co. Ltd., Korea) Professor Jiu-Bin Tan (Harbin Institute of Technology, China) Ms. Siew-Leng Tan (National Metrology Centre (NMC/A*STAR), Singapore) Mr. A. Tonmueanwai (National Institute of Metrology, Thailand (NIMT), Thailand) Professor Kazuhisa Yanagi (Nagaoka University, Japan) Local Organizing Committee Dr Victor Tzeng-Yow Lin (Center for Measurement Standards, ITRI, Taiwan) Professor Kuang-Chao Fan (National Taiwan University, Taiwan) Professor Jen-Fin Lin (ASME Fellow, National Cheng Kung University, Taiwan) Professor Chao-Chang Chen(National Taiwan University of Science and Technology, Taiwan) Professor Shih-Chieh Lin (National Tsing Hua University, Taiwan) Professor Liang-Chia Chen (National Taiwan University, Taiwan) Professor Fang-Jung Shiou (National Taiwan University of Science and Technology, Taiwan) Professor Chun-Hui Chung (National Taiwan University of Science and Technology, Taiwan) Professor Pin-Chuan Chen (National Taiwan University of Science and Technology, Taiwan) Dr Wen-En Fu (Center for Measurement Standards, ITRI, Taiwan)

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