A Simple and Fast Spline Filtering Algorithm for Surface Metrology

Hao Zhang,Daniel Ott,John Song,Mingsi Tong,Wei Chu
DOI: https://doi.org/10.6028/jres.120.010
2015-07-01
Journal of Research of the National Institute of Standards and Technology
Abstract:Spline filters and their corresponding robust filters are commonly used filters recommended in ISO (the International Organization for Standardization) standards for surface evaluation. Generally, these linear and non-linear spline filters, composed of symmetric, positive-definite matrices, are solved in an iterative fashion based on a Cholesky decomposition. They have been demonstrated to be relatively efficient, but complicated and inconvenient to implement. A new spline-filter algorithm is proposed by means of the discrete cosine transform or the discrete Fourier transform. The algorithm is conceptually simple and very convenient to implement.
instruments & instrumentation,physics, applied
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