Control and data acquisition system to study dielectric breakdown in low-pressure DC plasma reactor with parallels electrodes

Bernardo Vieira Magaldi,Rodrigo Sávio Pessoa,Mateus Pereira Cesare,Afonso André Ribeiro,Cristiane Aparecida Martins,Argemiro Soares da Silva Sobrinho
DOI: https://doi.org/10.17563/rbav.v40.1216
2022-01-18
Revista Brasileira de Aplicações de Vácuo
Abstract:This work aimed to present the theory of dielectric breakdown of a glow discharge through the automation of gas injection (mass flow) systems with pressure control (pressure gauge) and voltage source with voltage control, in the reactor for the acquisition of rupture parameters for low-pressure glow discharges. Through the analysis of Paschen’s curves for the configuration with argon gases and atmospheric air, it was observed that the rupture potential for argon gas is lower than for atmospheric air, although the ionization potential of atmospheric air is lower about argon.
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