Designer fabrication: nanotemplates get in shape

Anna Demming

DOI: https://doi.org/10.1088/0957-4484/24/5/050201

IF: 3.5

2013-01-16

Nanotechnology

Abstract:People working in device design rarely see something that works without thinking how it could be made to work better. The work on anodic aluminum oxide materials in this issue provides a case in point [1]. Over the past century researchers have observed, manipulated and exploited the porous structures that result when anodizing aluminum in for example oxalic, sulfuric, and phosphoric acid solutions [1, 2]. The self-organized pore arrays have demonstrated the potential to facilitate high through-put, low-cost fabrication of nanocomposites as well as other nanostructures. The straight self-aligned nanochannels in porous anodic aluminum oxide (AAO) have long been accepted as an inherent property of these films and for many applications they are an attractive attribute. However, researchers in Taiwan have considered a novel manifestation of AAO materials which may enhance their natural attributes by generating arrays that bend [3]. Their work is an example of how even well studied systems continue to harbour surprises and scope for creative innovation. As the authors point out, 'This novel fan-out platform facilitates probing and handling many signals from different areas on a sample's surface and is therefore promising for applications in detection and manipulation at the nanoscale level'. It has long been recognized that the inter-pore distance, pore diameter and pore depth in AAO can be controlled by changing the anodization conditions. These accommodating features have motivated researchers to seek a better understanding of how to optimize fabrication conditions. A collaboration of researchers in Sweden, Chile and Uruguay studied the structural and optical properties of silver nanowires electrodeposited in commercially available nanoporous alumina templates, with a nominal pore diameter of 20 nm [4]. Their results revealed a decrease in the uniformity of pore filling with increasing deposition overpotential and suggested that overpotentials were preferred for the formation of single crystal silver nanowires. More recently Hyungjun Kim and colleagues at the Pohang University of Science and Technology in Korea combined atomic layer deposition of ruthenium with AAO templates to fabricate a range of metal nanostructures directly onto silicon substrates, including nanodots, nanowires and nanowire array devices [5]. Ruthenium has been intensively studied for semiconductor devices, for use in metal gate electrodes, capacitor electrodes for dynamic random access memories and seed layers for electrochemical plating of copper interconnect formation. The work may prove significant in the semiconductor device industry where the ability to integrate with existing silicon technology is an important advantage. According to recent research in China AAO templates may also benefit LED devices. Zhou and colleagues reported the fabrication of GaN LEDs by soft UV nanoimprint lithography based on a replication stamp of self-ordered AAO membrane for the first time [6]. Photonic crystal nanostructures had been mooted as a possible solution to the total internal reflection that diminishes the external quantum efficiency of GaN LED devices compared with the performance that theory predicts. Conventional approaches to photonic crystal fabrication, such as electron-beam lithography or focused ion-beam techniques are problematic to scale up to industrial scales. In contrast to this, AAO templates are well suited to scaling up. Zhou et al reported an enhancement to the photoluminescence intensity from their nano-patterned GaN LED sample of 41% [6]. The fan-out AAO channel structure reported by Liu and colleagues in this issue introduces a new versatility in the application of AAO templates [1]. They allow mapping of information from a small area at one end of the channels to a large area at the other end with a one-to-one correspondence, and may benefit building integrated circuits containing many elements. As the researchers explain, planar fan-out probes have already been used to investigate nanomaterials, such as the electrical properties of nanorods, but the two-dimensional geometry introduces unwanted noise as a result of the probe touching a region other than the sensed one. The researchers describe a mechanism for bending nanochannels grown from AAO to create non-planar fan-out structures that avoid the draw backs of planar architectures. The approach exploits the linear proportionality in AAO between the inter-distance and diameter of the nanochannels and the anodization voltage. Doubling the voltage induces a larger repulsion among the nanochannels in each cell. As a result their growth directions become oblique while the pore diameter and inter-pore distance increase accordingly. This year, 2013, marks the centenary of the development of the Bohr model of the atom, for which Niels Bohr won the Nobel Prize. The model built on Rutherford's previous model and in a similar manner each of the developments in fabricating nanostructures and devices based on AAO have built on previous knowledge but with the addition of creative inspiration, which makes all the difference. In fact Niels Bohr is said to have once chided someone 'No, no, you're not thinking; you're just being logical'. Anyone working in research will be aware that success in science and technology requires creativity at least as much as in the arts. Advances in nanofabrication empower that creativity, inspiring designs and bringing them from the realms of fantasy to reality. References [1] Liu C-Y, Lai M Y, Tsai K-T, Chang H-H, He J-H, Shiue J and Wang Y-L 2013 A novel vertical fan-out platform based on an array of curved anodic alumina nanochannels Nanotechnology 24 055306 [2] Verwey E J W 1935 Electrolytic conduction of a solid insulator at high fields. The formation of the anodic oxide film on aluminium Physica 2 1059–63 [3] Li A P, Müller F, Bimer A, Nielsch K and Gösele U 1998 Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina J. Appl. Phys. 84 6023–6 [4] Riveros G, Green S, Cortes A, Gómez H, Marotti R E and Dalchiele E A 2006 Silver nanowire arrays electrochemically grown into nanoporous anodic alumina templates Nanotechnology 17 561–70 [5] Kim W-H, Park S-J, Son J-Y and Kim H 2008 Ru nanostructure fabrication using an anodic aluminum oxide nanotemplate and highly conformal Ru atomic layer deposition Nanotechnology 19 045302 [6]Zhou W, Min G, Song Z, Zhang J, Liu Y and Zhang J 2010 Enhanced efficiency of light emitting diodes with a nano-patterned gallium nitride surface realized by soft UV nanoimprint lithography Nanotechnology 21 205304

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to improve the manufacturing process of nanostructures by designing new nano - templates, especially by creating curved anodic aluminum oxide (AAO) nano - channel arrays to enhance their natural properties. Specifically, the researchers developed a new vertical fan - out platform based on curved AAO nano - channel arrays. This structure allows information to be mapped from a small area to a larger area while maintaining a one - to - one correspondence, which is particularly advantageous for constructing integrated circuits containing multiple components.

Traditional planar fan - out probes have been applied in the study of nanomaterials (such as the electrical properties of nanorods), but the two - dimensional geometry can cause the probe to touch areas other than the sensing area, thus introducing unnecessary noise. To solve this problem, the researchers proposed a mechanism to bend the nano - channels grown from AAO by changing the anodic oxidation voltage, thereby creating a non - planar fan - out structure and avoiding the disadvantages of the planar architecture.

This method takes advantage of the linear proportional relationship between the nano - channel spacing and diameter in AAO and the anodic oxidation voltage. When the voltage is doubled, a greater repulsive force is generated between the nano - channels in each unit, causing their growth directions to become inclined, and the diameter and spacing of the nano - channels also increase accordingly. This innovation not only improves the manufacturing precision of nanostructures but also opens up new possibilities for the application of nanotechnology, especially in the fields of optoelectronic devices and semiconductor devices.