Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors

R Kleimanov,I Komarevtsev,Y Enns,Y Akulshin,A Korshunov,A Shashkin,D Arefiev,A Kazakin
DOI: https://doi.org/10.1088/1742-6596/2086/1/012184
2021-12-01
Journal of Physics: Conference Series
Abstract:Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.
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