Passive Wireless Strain Sensors Using Microfabricated Magnetoelastic Beam Elements

Venkatram Pepakayala,Scott R. Green,Yogesh B. Gianchandani

DOI: https://doi.org/10.1109/jmems.2014.2313809

IF: 2.829

2014-12-01

Journal of Microelectromechanical Systems

Abstract:This paper describes resonant wireless strain sensors fabricated from magnetoelastic alloys. The transduction mechanism is the $\Delta{\rm E}$ effect—the change in stiffness of magnetoelastic materials with applied strain or magnetic field. This is measured as a shift in the resonant frequency and is detected wirelessly using pick-up coils utilizing the magnetoelastic coupling of these materials. The sensors are fabricated from a 28- $\mu{\rm m}$ -thick foil of Metglas 2826 MB $({\rm Fe}_{40}{\rm Ni}_{\rm 38}{\rm Mo}_{\rm 4}{\rm B}_{18})$ , a ferromagnetic magnetoelastic alloy, using microelectrodischarge machining. Two sensor types are described—single and differential. The single sensor has an active area of 7 $\,\times\,$ 2 ${\rm mm}^{2}$ , excluding the anchors. At 23 $^{\circ}{\rm C}$ , it operates at a resonant frequency of 230.8 kHz and has a sensitivity of $13\times 10^{3}~{\rm ppm}/{\rm mstrain}$ ; the dynamic range is 0.05–1.05 mstrain. The differential sensor includes a strain independent reference resonator of area 2 $\,\times\,$ 0.5 ${\rm mm}^{2}$ in addition to a sensing element of area 2.5 $\,\times\,$ 0.5 ${\rm mm}^{2}$ that is divided into two segments. The sensor resonance is at 266.4 kHz and reference resonance is at 492.75 kHz. The differential sensor provides a dynamic range for 0–1.85 mstrain with a sensitivity of $12.5\times 10^{3}~{\rm ppm}/{\rm mstrain}$ at 23 $^{\circ}{\rm C}$ . The reference resonator of the differential sensor is used to compensate for the temperature dependence of the Young's modulus of Metglas 2826 MB, which is experimentally estimated to be ${-}{\rm 524}~{\rm ppm}/^{\circ}{\rm C}$ . For an increment of 35 $^{\circ}{\rm C}$ , uncompensated sensors exhibit a resonant frequency shift of up to 42% of the dynamic range for the single sensor and 30% of the dynamic range of the differential sensor, underscoring the necessity of temperature compensation. The geometry of both types of sensors can be modified to accommodate a variety of sensitivity and dynamic range requirements. $\hfill{[2013\hbox{-}0330]}$

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied