Monitoring of a dielectric barrier discharge-based process using the gas gap voltage

Robert Bansemer,Ansgar Schmidt-Bleker,Ursula van Rienen,Klaus-Dieter Weltmann
DOI: https://doi.org/10.1088/1361-6595/ab0034
2019-02-20
Plasma Sources Science and Technology
Abstract:A method to monitor a temperature-sensitive process based on a sine-driven dielectric barrier discharge (DBD) has been developed and investigated. It uses the gas gap voltage in the active phases during the self-pulsing operation to obtain a value representing the gas temperature in the process chamber. The influence of pressure to the gas gap voltage is taken into account. By comparing the results to measurements by a thermistor and numerical simulations, it was found that the method in the considered application can deliver reasonable results that are robust against variations in the gas flow rates. Therefore, the generated data are potentially suitable as an input parameter to control processes such as the production of specific reactive species in flow-driven DBD-based devices. In particular, the method allows controlling a heat-up phase without gas flow prior to the actual usage of the device.
physics, fluids & plasmas
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