Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process

Naoki Inoue,Masayoshi Nagao,Katsuhisa Murakami,Sommawan Khumpuang,Shiro Hara,Yoshinori Takao
DOI: https://doi.org/10.7567/1347-4065/ab0fee
IF: 1.5
2019-05-24
Japanese Journal of Applied Physics
Abstract:To improve the thrust density of electrospray thrusters using ionic liquids as the propellant, wehave fabricated a high-density emitter array utilizing the fabrication technique of a field emitterarray (FEA) or gated nano electron sources. The density of the emitter array can reach approximately4 million cm −2 , which is four orders of magnitude higher than that of conventional electrospraythrusters. Performing deep reactive ion etching from the back side of the same structure as FEAs andremoving their Ni cones by dilute nitric acid, we have successfully fabricated sub- μ m scalecapillary emitters with self-aligned extractor electrodes and ionic liquid reservoirs behind them.Current measurements were also conducted with EMI-BF 4 and EMI-DCA as the propellant. Although theion was not extracted with EMI-BF 4 owing to its electrochemical reaction with the electrodes, bothpositive and negative ion currents were detected using EMI-DCA, where...
physics, applied
What problem does this paper attempt to address?