Prediction of amorphous phase formation by thermodynamic and kinetic analysis, a Fe-based thin film metallic glass deposited by direct current magnetron sputtering

Ali Obeydavi,Ahmad Rezaeian,Ali Shafyei,Parviz Kameli,Jyh-Wei Lee
DOI: https://doi.org/10.1088/2053-1591/ab2bc4
IF: 2.025
2019-07-01
Materials Research Express
Abstract:In this paper, the Miedema's model and atomic size mismatch (<i>δ</i> factor) were expanded for prediction (Thermodynamic and kinetic analysis) of amorphous structure of an Fe-based thin film system and followed by experimental verification. The Fe<sub>44</sub>Cr<sub>15</sub>Mo<sub>14</sub>Co<sub>7</sub>C<sub>10</sub>B<sub>5</sub>Si<sub>5</sub> thin film metallic glass (TFMG) on P-type Si (100) wafer substrate was deposited by a direct current (DC) magnetron sputtering process with an alloy target derived via spark plasma sintering. In addition, phase and microstructural evolutions of TFMG were studied through x-ray Diffraction (XRD), Grazing Incidence x-ray Diffraction (GIXRD), Atomic Force Microscopy (AFM), Field Emission Scanning Electron Microscopy (FESEM) and Transmission Electron Microscopy equipped with Selected Area Electron Diffraction (TEM-SAED) analysis. The enthalpy, Gibbs free energy changes and the <i>δ</i> factor of the alloy thin film were calculated to be −429.73 kJ.mole<sup>−1</sup>, −433.81 kJ.mole<sup>−1</sup> and 16.2, respectively. It can be found that through the Extended Miedema's model and the <i>δ</i> factor, the amorphous structure for the above TFMG could be achieved. Results of XRD and TEM-SAED analysis showed that the TFMG with an amorphous structure was formed. Smooth and uniform surface with low surface roughness of 1.74 nm was detected by FE-SEM and AFM analysis, respectively.
materials science, multidisciplinary
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