Numerical enhancements of the microwave resonant cavity method for plasma diagnostics

J Faltýnek,V Kudrle,J Tesař,M Volfová,A Tálský
DOI: https://doi.org/10.1088/1361-6595/ab4300
2019-10-17
Plasma Sources Science and Technology
Abstract:Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries.
physics, fluids & plasmas
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