Design and fabrication of a Ti/Al thin-film electrode in the meander-shaped microchannel and its application for promoting capillary-driven dielectrophoresis blood separation

C C Lai,Y T Yeh,C K Chung
DOI: https://doi.org/10.1088/1361-6439/ab5b7e
2019-12-27
Journal of Micromechanics and Microengineering
Abstract:In this article, a Ti/Al thin film with Ti as an adhesive layer that merits high conductivity,excellent adhesion and low cost is used as the electrode in a biomedical blood separation chipinstead of the conventional biomedical electrode mostly made of expensive Au and/or Pt. The designand fabrication of the meander-shaped Ti/Al thin-film electrode are studied for the application topromote the capillary-driven dielectrophoresis (DEP) blood separation chip. The meandered electrodewith a castellated profile of 0.6 and 0.2 mm spacing instead of the flat one is designed on theglass substrate to produce an asymmetric electric field for the DEP force to separate the blood. Themeander-with-castellated electrode shape and gap affects the electric field gradient on theseparation performance. The patterning of the electrode was performed by the low-cost CO 2laser-ablated polymer tape rather than an expensive-complex photolithography process and thenfollowed by sputterin...
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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