A Review of the Segmented‐Target Approach to Combinatorial Material Synthesis by Pulsed‐Laser Deposition

Holger von Wenckstern,Max Kneiß,Anna Hassa,Philipp Storm,Daniel Splith,Marius Grundmann

DOI: https://doi.org/10.1002/pssb.201900626

2019-12-15

physica status solidi (b)

Abstract:Combinatorial material synthesis has led to a significant acceleration in the optimization of multinary compounds and a more efficient usage of source and substrate materials. Various growth methods, including physical vapor deposition, can be adopted to realize material libraries. Here, two approaches to combinatorial material synthesis based on ablation of segmented targets during pulsed‐laser deposition are reviewed. For these two processes either laterally‐ or radially‐segmented targets are utilized and allow the creation of lateral and vertical composition spreads, respectively. Radially‐segmented targets can additionally be used to synthezise a discrete binary material library. Both approaches are introduced by calculating the expected material distribution with a simple geometric plasma expansion model. Then, experimentally determined elemental distributions and growth rates are compared to predictions and it is demonstrated that differences between calculated and experimental data contain vital information on the influence of, e.g., thermodynamic processes on the growth mechanism.This article is protected by copyright. All rights reserved.

physics, condensed matter