PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

Xi-Ting Lei,Li-Fen Tong,Ming-Zhen Xu,Yong You,Xiao-Bo Liu

DOI: https://doi.org/10.1007/s10118-020-2417-7

2020-05-18

Chinese Journal of Polymer Science

Abstract:Low dielectric interlayer films have become an important element to ensure the development of the microelectronics industry. A kind of flexible interlayer dielectrics, polyarylene ether nitrile/bisphenol A cyanate ester (PEN/BADCy) film, with good thermal stability and low frequency dependence, has been developed by solution casting method. Herein, materials were designed to incorporate bisphenol A cyanate ester as a part of blend, contributing to the frequency stability and structural integrity. The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures. The dielectric films could present high thermal stability with <i>T</i>_g&gt;180 °C. Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz. When the prepolymerization time was 3 h and final curing temperature reached 230 °C, the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz, respectively. The dimensional stability (CTE = 53.67 × 10⁻⁶ K⁻¹) was confirmed and considered beneficial to use as an interlayer dielectrics.

polymer science