Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film

Sebastjan Glinsek,Mohamed Aymen Mahjoub,Matthieu Rupin,Tony Schenk,Nicolas Godard,Stéphanie Girod,Jean‐Baptiste Chemin,Renaud Leturcq,Nathalie Valle,Sébastien Klein,Cédrick Chappaz,Emmanuel Defay
DOI: https://doi.org/10.1002/adfm.202003539
IF: 19
2020-07-02
Advanced Functional Materials
Abstract:<p>Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO<sub>2</sub> layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist.</p>
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
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