Abstract:The microstructure is a critical factor governing the functionality of ceramic materials. Meanwhile, microstructural analysis of electron microscopy images of polycrystalline ceramics, which are geometrically complex and composed of countless crystal grains with porosity and secondary phases, has generally been performed manually by human experts. Objective pixel-based analysis (semantic segmentation) with high accuracy is a simple but critical step for quantifying microstructures. In this study, we apply neural network-based semantic segmentation to secondary electron images of polycrystalline ceramics obtained by three-dimensional (3D) imaging. The deep-learning-based models (e.g., fully convolutional network and U-Net) by employing a dataset based on a 3D scanning electron microscopy with a focused ion beam is found to be able to recognize defect structures characteristic of polycrystalline materials in some cases due to artifacts in electron microscopy imaging. Owing to the training images with improved depth accuracy, the accuracy evaluation function, intersection over union (IoU) values, reaches 94.6% for U-Net. These IoU values are among the highest for complex ceramics, where the 3D spatial distribution of phases is difficult to locate from a 2D image. Moreover, we employ the learned model to successfully reconstruct a 3D microstructure consisting of giga-scale voxel data in a few minutes. The resolution of a single voxel is 20 nm, which is higher than that obtained using a typical X-ray computed tomography. These results suggest that deep learning with datasets that learn depth information is essential in 3D microstructural quantifying polycrystalline ceramic materials. Additionally, developing improved segmentation models and datasets will pave the way for data assimilation into operando analysis and numerical simulations of in situ microstructures obtained experimentally and for application to process informatics.

Understanding important features of deep learning models for segmentation of high-resolution transmission electron microscopy images

Uncertainty-aware particle segmentation for electron microscopy at varied length scales

Deep Learning Segmentation of Complex Features in Atomic-Resolution Phase Contrast Transmission Electron Microscopy Images

Deep learning assisted high resolution microscopy image processing for phase segmentation in functional composite materials

Segmentation in large-scale cellular electron microscopy with deep learning: A literature survey

Deep learning for fast segmentation and critical dimension metrology & characterization enabling AR/VR design and fabrication

Advancing electron microscopy using deep learning

Machine-Learning-based Algorithms for Automated Image Segmentation Techniques of Transmission X-ray Microscopy (TXM)

Performance, Successes and Limitations of Deep Learning Semantic Segmentation of Multiple Defects in Transmission Electron Micrographs

A deep learning approach for semantic segmentation of unbalanced data in electron tomography of catalytic materials

Review: Deep Learning in Electron Microscopy

Deep learning for three-dimensional segmentation of electron microscopy images of complex ceramic materials

Catalyzing Clinical Diagnostic Pipelines Through Volumetric Medical Image Segmentation Using Deep Neural Networks: Past, Present, & Future

Attention based morphological guided deep learning network for neuron segmentation in electron microscopy

Deep learning in mesoscale brain image analysis: A review

Deep learning object detection in materials science: Current state and future directions

A deep learned nanowire segmentation model using synthetic data augmentation

Deep Learning of Atomically Resolved Scanning Transmission Electron Microscopy Images: Chemical Identification and Tracking Local Transformations

Efficient Phase Segmentation of Light-Optical Microscopy Images of Highly Complex Microstructures Using a Correlative Approach in Combination with Deep Learning Techniques

Deep learning based supervised semantic segmentation of Electron Cryo-Subtomograms

Machine Learning Pipeline for Segmentation and Defect Identification from High Resolution Transmission Electron Microscopy Data