The structure and composition of Al-Si-N/Ni/Al-Si-N three-layer coatings deposited by magnetron sputtering

T. A. Gubaidulina,T. I. Dorofeeva,V. P. Sergeev,M. P. Kalashnikov,A. V. Voronov
DOI: https://doi.org/10.1063/5.0084705
2022-01-01
Abstract:The treatise studies the composition and structure of layers composing the multilayer Al-Si-N/Ni/Al-Si-N coatings produced by magnetron sputtering. The results confirm the columnar crystal structure in all the layers, with Al-Si-N layer having a nanocrystalline structure, and the nickel layer having a monocrystalline structure. The XRD analysis revealed an AlN phase with hexagonal close-packed lattice together with Si3N4 phase in the Al-Si-N layer, which was confirmed by the interpretation of microdiffraction images obtained by a transmission electron microscope.
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