Recent Progress of Deep Ultraviolet Photodetectors using Amorphous Gallium Oxide Thin Films

Huili Liang,Zuyin Han,Zengxia Mei
DOI: https://doi.org/10.1002/pssa.202000339
2020-10-14
physica status solidi (a)
Abstract:<p>Deep ultraviolet (UV) photodetectors have wide applications both in civil and military fields. Many materials have been explored to realize deep UV photodetection. Amorphous gallium oxide (a‐GaO<sub>x</sub>), as a member of transparent amorphous oxide semiconductors (TAOS), has attracted a great deal of attention due to its ultra‐wide band gap and scalable synthesis at room temperature. Plenty of researches have been focused on this topic in recent years. This review summarizes the latest progresses in the preparation methods of a‐GaO<sub>x</sub> using radio‐frequency sputtering, pulsed laser deposition, atomic layer deposition and other deposition technique. Dependence of the stoichiometry, crystallinity, optical, electrical, and morphological properties on different preparation parameters and doping/alloying elements has been tentatively discussed, as well as those deep UV photodetectors based on a‐GaO<sub>x</sub> and related thin films. Finally, a short summary with further possible investigations is provided for a better understanding and development of a‐GaO<sub>x</sub> materials and photodetectors.</p><p>This article is protected by copyright. All rights reserved.</p>
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