Abstract:Abstract Ion-induced secondary electron emission at a target surface is an essential mechanism for laboratory plasmas, i.e. magnetron sputtering discharges. Electron emission, however, is strongly affected by the target condition itself such as oxidation. Data of oxidized targets, however, are very sparse and prone to significant systematic errors, because they were often determined by modeling the complex behavior of the plasma. Thus, it is difficult to isolate the process of ion-induced electron emission from all other plasma-surface-interactions. By utilizing ion beams, the complex plasma environment is avoided and electron yields are determined with higher accuracy. In this study, ion-induced secondary electron emission coefficients (SEECs) of clean, untreated (air-exposed), and intentionally oxidized copper and nickel surfaces were investigated in such a particle beam experiment. Pristine and oxidized metal foils were exposed to beams of singly charged argon ions with energies of 0.2 keV - 10 keV. After the ion beam treatment, the surface conditions were analyzed by ex-situ x-ray photoelectron spectroscopy measurements. Further, a model for the electron emission of a partly oxidized surface is presented, which is in agreement with the experimental data. It was found, that oxidized and untreated/air-exposed surfaces do not show the same SEEC: for intentionally oxidized targets, the electron yields were smaller by a factor of 2 than for untreated/air-exposed surfaces. SEECs of oxides were found to be between the values for clean and for untreated metal surfaces. Further, the SEEC was at maximum for untreated/air-exposed surfaces and at minimum for clean surfaces; the electron yields of untreated/air-exposed and clean surfaces were in agreement with values reported in the literature.

Surface characterization determined from the secondary electron emission coefficient upon ion bombardment

Influence of surface topography on the secondary electron yield of clean copper samples.

Study of ion sputtering on AlxSn100-x alloy system

Secondary Electron Emission from Surfaces with Small Structure

Size distribution of sputtered particles from Au nanoislands due to MeV self-ion bombardment

Surface Vs. Bulk Electronic Structure of Silver Determined by Photoemission

Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments

Composition Profiles at Initial Stage of Altered Layer Formation on Cu-Pt Alloy Surfaces under Ar+ Ion Bombardment

Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges

Influence of an electron-beam exposure on the surface plasmon resonance of gold nanoparticles

Surface Characterization of Stainless Steels Prepared with Various Surface Treatments

Angular-Distribution Of Elastically Reflected Electrons From Au

The quantitative effect of thermal treatment on the secondary electron yield from air-exposed silver surface

Secondary Electron Emission from Carbon Foils under O2+ Ion Impact

Electron emission and surface etching by slow and medium highly charged ions on HOPG surface

HICS: Highly charged ion collisions with surfaces

Charge‐State‐Enhanced Ion Sputtering of Metallic Gold Nanoislands

Local Secondary-Electron Emission Spectra of Graphite and Gold Surfaces Obtained Using the Scanning Probe Energy Loss Spectrometer (Spels)

Ion Bombardment Induced Surface Microstructural Modification of Aluminum Alloy

Comparison Experiment on the Sputtering of EUROFER, RUSFER and CLAM Steels by Deuterium Ions

Transport of secondary electrons through coatings of ion-irradiated metallic nanoparticles