MEMS-based electric field sensor with environmental adaptability consideration and its application in the near-ground atmosphere

WEN Xiaolong,Pengfei Yang,CHU Zhaozhi,Chunrong Peng,LIU Yutao,WU Shuang
DOI: https://doi.org/10.1088/1742-6596/1775/1/012003
2021-01-01
Journal of Physics: Conference Series
Abstract:Abstract The near-ground electric field (E-field) is an important parameter needed to be measured for lightning warning systems. Yet, most of the E-field sensors are based on bulky and expensive rotate-vane mills. This paper presents a novel MEMS(Micro-electro-mechanical Systems)-based sensor and its application in near-ground atmospheric E-field long-term monitoring. We solve the problem of environmental adaptability by means of a novel macromolecular polymer package and moisture-proof design. To enhance the electric field resolution, a Φ 36mm×17mm probe is mounted separately from the signal processing circuit. Both finite element simulation and experimental results prove that this sensor could detect the electric field as small as 5V/m. The real-time monitoring data have a good consistency with those of the commercial electric field mill.
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