Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment

Haruka SUZUKI,KOMA Hirotsugu,Tomohiro OGASAWARA,Yosuke KOIKE,Hirotaka Toyoda,Hirotsugu KOMA
DOI: https://doi.org/10.1585/pfr.16.1406046
2021-04-09
Plasma and Fusion Research
Abstract:Spatial uniformity of an atmospheric-pressure microwave line plasma is evaluated from surface hydrophilicity treatment of polyethylene terephthalate film as well as observation of optical emission from the plasma. Prior to the experiments, the structure of the waveguide-based plasma source is optimized using a three-dimensional electromagnetic simulation to suppress standing-wave generation for the uniformity of plasma production. The spatial distribution in the longitudinal direction of the Argon (Ar) plasma is investigated by operating the microscope parallel to the slot and by irradiating film with the plasma to improve surface wettability of the film. Uniform profile of water contact angle is obtained in 40cm with very high-speed processing.
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