Small angle x-ray scattering (SAXS) and Q-space weighting filter for ×3 CD-extraction accuracy improvement

Yukihide Tsuji,Doyun Kim,Gwangsu Yoo,ByungHyun Hwang,Kwanghoon Kim,Donhwan Lee,Yoshinori Sasai,Shinwook Yi,Jaehoon Jeong,Dongchul Ihm,ChungSam Jun,Dae Sin Kim
DOI: https://doi.org/10.1063/5.0037138
IF: 1.697
2021-06-01
AIP Advances
Abstract:A small angle x-ray scattering simulator has been developed for metrology and inspection applications based on the first Born approximation considering non-ideal equipment-related factors. The simulator shows good reproducibility in various device structures and measurement environments, including slit-configurations and incident angles. In addition, a Q-space adaptive weighting method is proposed to enhance about 300% accuracy, especially on non-single repeated pitch structures such as VNAND with complex x-ray diffraction patterns.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
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