Non-axisymmetric droplet irradiation effects on ion and extreme ultraviolet light emission of laser-produced plasma light sources

Markus Brandstätter,Marco M. Weber,Reza S. Abhari
DOI: https://doi.org/10.1063/5.0050927
IF: 2.877
2021-06-21
Journal of Applied Physics
Abstract:Extreme ultraviolet (EUV) light emission and ion emissions in the lateral direction generated by Nd:YAG irradiated droplet targets were studied experimentally under non-axisymmetric droplet irradiation. EUV energy monitors and ion electrostatic probes were positioned symmetrically at fixed positions around the plasma. Bulk ion kinetic energy <span class="equationTd inline-formula"><math> E k i n</math></span> and bulk ion density <span class="equationTd inline-formula"><math> n i</math></span> were characterized for angles of <span class="equationTd inline-formula"><math> γ = 31 °</math></span> to <span class="equationTd inline-formula"><math> γ = 90 °</math></span> from the laser axis in a low-pressure nitrogen atmosphere of <span class="equationTd inline-formula"><math> 1 × 10 − 2 mbar</math></span>. The EUV light emission reached a maximum level, with an increase of 5%, at <span class="equationTd inline-formula"><math> γ = 60 °</math></span> through a shift of the droplet by around 18% of the droplet diameter. The ion bulk kinetic energies at 31° and 75° also increased by 9% and 15%, respectively, with a small increase in ion density of around 3%. Intentional offset of the droplet target can, therefore, potentially result in higher EUV light output for non-axisymmetric mirror configurations, at the expense of a higher ion load but a decreased droplet fragment load. The ion kinetic energy showed a strongly anisotropic expansion behavior when offsetting the droplet relative to the laser focus, with kinetic energies increasing up to 60% in the lateral direction by offsetting the droplet by more than <span class="equationTd inline-formula"><math> 0.5</math></span> droplet diameters for a lateral range of 31°–90°. The ion density showed a more isotropic change with droplet offset, while maintaining a forward-peaked distribution.
physics, applied
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