Kinetics of Decomposition of Silane (Diluted in Argon) in a Low Pressure Glow Discharge

G. Nolet
DOI: https://doi.org/10.1149/1.2134390
IF: 3.9
1975-08-01
Journal of The Electrochemical Society
Abstract:The high temperature electrons in a plasma are able to excite as well as to ionize neutral atoms and molecules. At sufficiently low pressures, the inelastic collisions between electrons and molecules are generally considered to be the most effective mechanism for molecular dissociation in the positive column of a glow discharge. It is therefore expected to obtain, at constant current density, a first‐order reaction with respect to the molar fraction of the reagent, if all other reactions are negligible. In the case of silane diluted in argon investigated in this work, the first‐order rate equation lnXSiH4=−kt is not observed; in this equation k is the first‐order rate constant, t the gas transit time in the discharge, and XSiH4 the mole fraction of silane at time t . The k value increases with time during decomposition. This is attributed to an increase of the electronic temperature of the gaseous mixture during its transformation.
electrochemistry,materials science, coatings & films
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