A MEMS Optical Phased Array Based on Pitch Tunable Silicon Micromirrors for LiDAR Scanners

Tarek Mohammad,Siyuan He,Ridha Ben Mrad

DOI: https://doi.org/10.1109/jmems.2021.3092701

IF: 2.829

2021-10-01

Journal of Microelectromechanical Systems

Abstract:This paper presents the design, modeling, fabrication, and testing of an optical phased array (OPA) based scanner utilizing microelectromechanical system (MEMS) micromirrors with in-plane pitch tuning capability for high-speed and high-resolution laser beam steering. A pair of lateral comb-drive actuators are located at both sides of the free-standing structure of the micromirror array and used to generate the force required for in-plane motion of the micromirrors. Identical folded-beam flexures on both sides of the moving part of each comb-drive actuator allow for the precisely guided lateral motion and reduction of the in-plane mechanical stiffness. The mirror-positioned flexures enable a symmetrical structure which helps to reduce side instability as well as levitation during lateral comb-drive actuation. Analytical models of the OPA structure are presented for estimations of the micro actuator performance as well as the optical characteristics. A prototype for the proposed OPA system with polysilicon as structural material and gold as optically reflective surface is fabricated using a surface micromachining process. The optical path difference is realized by slightly elevating every other micromirrors along the array in order to form the required optical phase shift. The aperture size of the OPA based scanner is about <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="31.908ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 13738 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-39" x="500" y="0"></use> <use xlink:href="#MJMAIN-35" x="1001" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1501" y="0"></use> <use xlink:href="#MJMAIN-2C" x="1946" y="0"></use> <use xlink:href="#MJMATHI-6D" x="2391" y="0"></use> <use xlink:href="#MJMATHI-75" x="3270" y="0"></use> <use xlink:href="#MJMATHI-74" x="3842" y="0"></use> <use xlink:href="#MJMATHI-65" x="4204" y="0"></use> <use xlink:href="#MJMATHI-78" x="4670" y="0"></use> <use xlink:href="#MJMATHI-74" x="5243" y="0"></use> <use xlink:href="#MJMATHI-6D" x="5604" y="0"></use> <use xlink:href="#MJMAIN-2C" x="6483" y="0"></use> <use xlink:href="#MJMAIN-2C" x="6928" y="0"></use> <use xlink:href="#MJMATHI-74" x="7373" y="0"></use> <use xlink:href="#MJMATHI-69" x="7735" y="0"></use> <use xlink:href="#MJMATHI-6D" x="8080" y="0"></use> <use xlink:href="#MJMATHI-65" x="8959" y="0"></use> <use xlink:href="#MJMATHI-73" x="9425" y="0"></use><g transform="translate(9895,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-38" x="500" y="0"></use> <use xlink:href="#MJMAIN-35" x="1001" y="0"></use></g> <use xlink:href="#MJMAIN-2C" x="11396" y="0"></use> <use xlink:href="#MJMAIN-2C" x="11841" y="0"></use> <use xlink:href="#MJMATHI-6D" x="12287" y="0"></use> <use xlink:href="#MJMATHI-75" x="13165" y="0"></use></g></svg></span> m and the fill factor of the array is 40-57%. Pitch tuning due to the electrostatic actuation results in an optical steering range of 0.06° with angular resolution of 0.002° at 30 V and a laser wavelength of 650 nm. [2021-0070]<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMAIN-31" d="M213 578L200 573Q186 568 160 563T102 556H83V602H102Q149 604 189 617T245 641T273 663Q275 666 285 666Q294 666 302 660V361L303 61Q310 54 315 52T339 48T401 46H427V0H416Q395 3 257 3Q121 3 100 0H88V46H114Q136 46 152 46T177 47T193 50T201 52T207 57T213 61V578Z"></path><path stroke-width="1" id="MJMAIN-39" d="M352 287Q304 211 232 211Q154 211 104 270T44 396Q42 412 42 436V444Q42 537 111 606Q171 666 243 666Q245 666 249 666T257 665H261Q273 665 286 663T323 651T370 619T413 560Q456 472 456 334Q456 194 396 97Q361 41 312 10T208 -22Q147 -22 108 7T68 93T121 149Q143 149 158 135T173 96Q173 78 164 65T148 49T135 44L131 43Q131 41 138 37T164 27T206 22H212Q272 22 313 86Q352 142 352 280V287ZM244 248Q292 248 321 297T351 430Q351 508 343 542Q341 552 337 562T323 588T293 615T246 625Q208 625 181 598Q160 576 154 546T147 441Q147 358 152 329T172 282Q197 248 244 248Z"></path><path stroke-width="1" id="MJMAIN-35" d="M164 157Q164 133 148 117T109 101H102Q148 22 224 22Q294 22 326 82Q345 115 345 210Q345 313 318 349Q292 382 260 382H254Q176 382 136 314Q132 307 129 306T114 304Q97 304 95 310Q93 314 93 485V614Q93 664 98 664Q100 666 102 666Q103 666 123 658T178 642T253 634Q324 634 389 662Q397 666 402 666Q410 666 410 648V635Q328 538 205 538Q174 538 149 544L139 546V374Q158 388 169 396T205 412T256 420Q337 420 393 355T449 201Q449 109 385 44T229 -22Q148 -22 99 32T50 154Q50 178 61 192T84 210T107 214Q132 214 148 197T164 157Z"></path><path stroke-width="1" id="MJMAIN-2C" d="M78 35T78 60T94 103T137 121Q165 121 187 96T210 8Q210 -27 201 -60T180 -117T154 -158T130 -185T117 -194Q113 -194 104 -185T95 -172Q95 -168 106 -156T131 -126T157 -76T173 -3V9L172 8Q170 7 167 6T161 3T152 1T140 0Q113 0 96 17Z"></path><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path><path stroke-width="1" id="MJMATHI-69" d="M184 600Q184 624 203 642T247 661Q265 661 277 649T290 619Q290 596 270 577T226 557Q211 557 198 567T184 600ZM21 287Q21 295 30 318T54 369T98 420T158 442Q197 442 223 419T250 357Q250 340 236 301T196 196T154 83Q149 61 149 51Q149 26 166 26Q175 26 185 29T208 43T235 78T260 137Q263 149 265 151T282 153Q302 153 302 143Q302 135 293 112T268 61T223 11T161 -11Q129 -11 102 10T74 74Q74 91 79 106T122 220Q160 321 166 341T173 380Q173 404 156 404H154Q124 404 99 371T61 287Q60 286 59 284T58 281T56 279T53 278T49 278T41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-73" d="M131 289Q131 321 147 354T203 415T300 442Q362 442 390 415T419 355Q419 323 402 308T364 292Q351 292 340 300T328 326Q328 342 337 354T354 372T367 378Q368 378 368 379Q368 382 361 388T336 399T297 405Q249 405 227 379T204 326Q204 301 223 291T278 274T330 259Q396 230 396 163Q396 135 385 107T352 51T289 7T195 -10Q118 -10 86 19T53 87Q53 126 74 143T118 160Q133 160 146 151T160 120Q160 94 142 76T111 58Q109 57 108 57T107 55Q108 52 115 47T146 34T201 27Q237 27 263 38T301 66T318 97T323 122Q323 150 302 164T254 181T195 196T148 231Q131 256 131 289Z"></path><path stroke-width="1" id="MJMAIN-38" d="M70 417T70 494T124 618T248 666Q319 666 374 624T429 515Q429 485 418 459T392 417T361 389T335 371T324 363L338 354Q352 344 366 334T382 323Q457 264 457 174Q457 95 399 37T249 -22Q159 -22 101 29T43 155Q43 263 172 335L154 348Q133 361 127 368Q70 417 70 494ZM286 386L292 390Q298 394 301 396T311 403T323 413T334 425T345 438T355 454T364 471T369 491T371 513Q371 556 342 586T275 624Q268 625 242 625Q201 625 165 599T128 534Q128 511 141 492T167 463T217 431Q224 426 228 424L286 386ZM250 21Q308 21 350 55T392 137Q392 154 387 169T375 194T353 216T330 234T301 253T274 270Q260 279 244 289T218 306L210 311Q204 311 181 294T133 239T107 157Q107 98 150 60T250 21Z"></path></defs></svg>

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied