Abstract:We present the development of a new algorithm which combines state-of-the-art energy-dispersive X-ray (EDX) spectroscopy theory and a suitable machine learning formulation for the hyperspectral unmixing of scanning transmission electron microscope EDX spectrum images. The algorithm is based on non-negative matrix factorization (NMF) incorporating a physics-guided factorization model. It optimizes a Poisson likelihood, under additional simplex constraint together with user-chosen sparsity-inducing and smoothing regularizations, and is based on iterative multiplicative updates. The fluorescence of X-rays is fully modeled thanks to state-of-the-art theoretical work. It is shown that the output of the algorithm can be used for a direct chemical quantification. With this approach, it is straightforward to include a priori knowledge on the specimen such as the presence or absence of certain chemical elements in some of its phases. This work is implemented within two open-source Python packages, espm and emtables, which are used here for data simulation, data analysis and quantification. Using simulated data, we demonstrate that incorporating physical modeling in the decomposition helps retrieve meaningful components from spatially and spectrally mixed phases, even when the data are very noisy. For synthetic data with a higher signal, the regularizations yield a tenfold increase in the quality of the reconstructed abundance maps compared to standard NMF. Our approach is further validated on experimental data with a known ground truth, where state-of-the art results are achieved by using prior knowledge about the sample. Our model can be generalized to any other scanning spectroscopy techniques where underlying physical modeling can be linearized.

Spectrum adapted expectation-conditional maximization algorithm for extending high–throughput peak separation method in XPS analysis

High-throughput XPS spectrum modeling with autonomous background subtraction for 3d5/2 peak mapping of SnS

[Fast Spectral Modeling Based on Voigt Peaks].

Automated peak fitting of XPS spectrum using information criteria

Model-Fitting Weighted Least Squares as an Alternative to Principal Component Analysis for Analyzing Energy-Dispersive X-ray Spectroscopy Spectrum Images

Application of Expectation Maximization to X-Ray Spectrum Estimation for Medical Accelerators from Transmission Data

Using the Expectation Maximization Algorithm with Heterogeneous Mixture Components for the Analysis of Spectrometry Data

SPEX: High-Resolution Spectral Modeling and Fitting for X-ray Astronomy

X-ray Spectrum Estimation from Transmission Measurements Using the Expectation Maximization Method

Accelerating X-ray photoemission spectroscopy measurements using Bayesian super-resolution

Modeling the Echelle Spectra Continuum with Alpha Shapes and Local Regression Fitting

Bayesian Hamiltonian Selection in X-ray Photoelectron Spectroscopy

Spectra Analysis Based on Peak Fitting Algorithm

Leveraging Machine Learning for Advanced Nanoscale X-ray Analysis: Unmixing Multicomponent Signals and Enhancing Chemical Quantification

The Rising Sun Envelope Method: an automatic and accurate peak location technique for XANES measurements

Adaptive design of an X-ray magnetic circular dichroism spectroscopy experiment with Gaussian process modelling

Method for Unfolding Multiplet Regions of X- and Γ-Ray Spectra with a Detection Efficiency Constraint Avoiding Inflecting the Peak Shapes for Correction Results

Monte-Carlo Fitting and Its Application in Electron Momentum Spectroscopy Data Processing

Spectrometer Calibration by Expectation Maximization Method

From STEM-EDXS data to phase separation and quantification using physics-guided NMF

X-RAY SPECTRA RECONSTRUCTION OF THOMSON SCATTERING SOURCE FROM ANALYSIS OF ATTENUATION DATA*