Detection of SO2F2 concentration of SF6 decomposition product in GIS gas chamber based on ICL-TDLAS

Qiang Yao,Xianglian Yan,Shukai He,Rubin Qi,Xintian Li,Xiao-zhe Zeng,Xinghui Wang,Shiling Zhang,Jigang Zi,Yunqi Yue
DOI: https://doi.org/10.1117/12.2601827
2021-10-09
Abstract:The corresponding experimental system was designed, and the direct absorption technology based on the principle of tunable laser absorption spectrum of inter-band cascade laser (ICL) was used to detect low concentration of sulfur fluoride (SO2F2) gas. The position of 3619 nm is chosen as the measurement spectrum line of SO2F2 gas, which can effectively avoid the cross interference of background components. At 35 ℃ of working temperature and 80 mA of current, the inter-band cascade laser emission wavelength can completely cover the absorption spectrum line at 3619 nm at the center of SO2F2 gas. The direct absorption spectrum of SO2F2 gas after deducting the background absorption is obtained by taking the logarithm of the ratio of the transmitted light intensity to the incident light intensity and the time-frequency conversion of the horizontal axis. The results show that the linear relationship between gas concentration and absorption intensity is good, the fitting coefficient R 2 is 0.997, and the system responsiveness is 0.782 mV/ppm. Three hundred sets of data were collected for 50 min, the relative standard deviation (RSD) was 0.25%, and the system sensitivity was 3.94 ppm. This method can provide a new method for the optical detection of SO2F2 gas, and then provide a reliable experimental basis for the detection of SO2F2 concentration of SF6 decomposition product in GIS gas chamber.
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