Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Compact solid-state vertical-cavity-surface-emitting-laser beam scanning module with ultra-large field of view

Solid-State Slow-Light Beam Scanner With Ultra-Large Field of View and High Resolution

Chip-compatible wide-field 3D nanoscopy through tunable spatial frequency shift effect

Wide-field 3D nanoscopy on chip through large and tunable spatial-frequency-shift effect

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Microcantilever-integrated photonic circuits for broadband laser beam scanning

A Hybrid Solid-State Beam Scanner for LiDAR Applications

Wide-angle high-precision electronically controlled continuous beam scanning implementation based on MLAS cascaded AFOC

Solid-state FMCW LiDAR with in-fiber beam scanner

A Hybrid Solid-State Beam Scanner for FMCW LiDAR Application.

Metasurface integrated Vertical Cavity Surface Emitting Lasers for programmable directional lasing emissions

High-Speed Two-Dimensional Spectral-Scanning Coherent LiDAR System Based on Tunable VCSEL

High‐Resolution 2D Quasi‐Distributed Optical Sensing with On‐Chip Multiplexed FSR‐Free Nanobeam Cavity Array

High-power 910 Nm Vertical-Cavity Surface-Emitting Laser Arrays for Light Detection and Ranging

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Ultra-compact electrically controlled beam steering chip based on coherently coupled VCSEL array directly integrated with optical phased array

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Telecom-band high contrast narrowband metalens for 3D imaging

Highly Compact All-Solid-State Beam Steering Module Based on a Metafiber

Solid-state FMCW LiDAR with Two-Dimensional Spectral Scanning Using a Virtually Imaged Phased Array.

Non-periodic wide-angle beam steering HCG array for application in VCSEL