Investigation of nanoSQUID designs for practical applications
Sylke Bechstein,Claudia Köhn,Dietmar Drung,Jan-Hendrik Storm,Oliver Kieler,Viacheslav Morosh,Thomas Schurig
DOI: https://doi.org/10.1088/1361-6668/aa557f
2017-02-01
Superconductor Science and Technology
Abstract:In the recent past, considerable effort was spent on the development of superconducting quantum interference device (SQUID) designs for magnetic detection in the micro- and nano-scale. Where these novel nanoSQUIDs were mostly of a simple format, real applications require more elaborate designs including auxiliary components such as coils and transformers. Therefore, we have developed SQUID designs based on a Nb/HfTi/Nb thin-film technology which offers both, nano-patterning and waferscale manufacturing of complex design structures. Employing e-beam lithography and chemical–mechanical polishing process steps, the area of the superconductor–normal conductor–superconductor Josephson junctions of these nanoSQUIDs has been varied between 150 nm × 150 nm and 200 nm × 200 nm, whereas the thickness of the barrier is about 20 nm. In order to enable real practical applications, nanoSQUID designs with a number of implemented auxiliary components and design features, such as gradiometric feedback loops, gradiometric transformers, and rf filters, have been carefully investigated. This paper combines a summary of recent achievements with a presentation of detailed measurements of the device performance in magnetic fields of up to a few tens of millitesla. This investigation is intended to pave the way for future practical complex nanoSQUID tools.
physics, condensed matter, applied