Very large scale characterization of graphene mechanical devices using a colorimetry technique

Santiago Jose Cartamil-Bueno,Alba Centeno,Amaia Zurutuza,Peter Gerard Steeneken,Herre Sjoerd Jan van der Zant,Samer Houri
DOI: https://doi.org/10.48550/arXiv.1805.01566
2018-05-03
Applied Physics
Abstract:We use a scalable optical technique to characterize more than 21000 circular nanomechanical devices made out of suspended single- and double-layer graphene on cavities with different diameters ($D$) and depths ($g$). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated to a structural mechanics scaling parameter given by $D^4/g^3$. Moreover, we extract a median adhesion energy of $\Gamma =$ 0.9 J/m$^2$ between the membrane and the native SiO$_2$ at the bottom of the cavities.
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