A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

B.D. Hauer,C. Doolin,K.S.D. Beach,J.P. Davis
DOI: https://doi.org/10.1016/j.aop.2013.08.003
IF: 3.036
2013-12-01
Annals of Physics
Abstract:We describe a general procedure to calibrate the detection of a nano/micro-mechanical resonator’s displacement as it undergoes thermal Brownian motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function, which is identical in all situations aside from a system-dependent effective mass value. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.
physics, multidisciplinary
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