Wireless Temperature Measurement for Curved Surfaces Based on AlN Surface Acoustic Wave Resonators

Huali Liu,Zhixin Zhou,Liang Lou

DOI: https://doi.org/10.3390/mi15050562

IF: 3.4

2024-04-26

Micromachines

Abstract:In this paper, we propose a novel method for temperature measurement using surface acoustic wave (SAW) temperature sensors on curved or irregular surfaces. We integrate SAW resonators onto flexible printed circuit boards (FPCBs) to ensure better conformity of the temperature sensor with the surface of the object under test. Compared to traditional rigid PCBs, FPCBs offer greater dynamic flexibility, lighter weight, and thinner thickness, which make them an ideal choice for making SAW devices working for temperature measurements under curved surfaces. We design a temperature sensor array consisting of three devices with different operating frequencies to measure the temperature at multiple points on the surface of the object. To distinguish between different target points in the sensor array, each sensor operates at a different frequency, and the operating frequency bands do not overlap. This differentiation is achieved using Frequency Division Multiple Access (FDMA) technology. Experimental results indicate that the frequency temperature coefficients of these sensors are −30.248 ppm/°C, −30.195 ppm/°C, and −30.115 ppm/°C, respectively. In addition, the sensor array enables wireless communication via antenna and transceiver circuits. This innovation heralds enhanced adaptability and applicability for SAW temperature sensor applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

### Problems the Paper Attempts to Solve

This paper aims to address the issue of temperature measurement on curved or irregular surfaces. Traditional temperature sensor systems (such as thermistors, thermocouples, and infrared-sensitive components) are widely used for temperature monitoring, but they still have many shortcomings when applied to curved surfaces. The main disadvantages of these traditional methods include:

1. **Mechanical Deformation Impact**: Resistance Temperature Detectors (RTDs) based on flexible substrates are significantly affected by mechanical deformation. When the substrate bends or stretches, the effective length of the RTD changes, leading to an increase in resistance, which affects its stability.
2. **Interference from Complex Factors**: Infrared thermal imaging technology faces various complex factors in practical applications, such as emissivity, measurement distance, angle selection, atmospheric transmittance, and size effect (SSE). Especially in curved surface temperature measurement, the emissivity of the coating changes with the observation angle, resulting in significant measurement errors.
3. **Material Limitations**: Traditional rigid PCB boards (such as FR-4) have poor thermal conductivity, high hardness, and limited environmental adaptability. FR-4 materials have a certain degree of hygroscopicity, and long-term exposure to humid environments may cause material expansion, affecting the performance and stability of the PCB.

To solve these problems, the paper proposes a new method using Surface Acoustic Wave (SAW) temperature sensors for wireless temperature measurement on curved or irregular surfaces. Specifically, this method integrates SAW resonators into flexible printed circuit boards (FPCBs) to ensure better adhesion of the temperature sensor to the surface of the measured object. Compared to traditional rigid PCBs, FPCBs have higher dynamic flexibility, lighter weight, and thinner thickness, making them an ideal choice for curved surface temperature measurement.