Microfluidic-Based Electrical Impedance Spectroscopy System Using Multilevel Lamination of Dry Film Photoresist

E. Yılmaz,U. Schnakenberg,Tom Kremers,J. Floehr,Yuan Cao
DOI: https://doi.org/10.1109/IWIS54661.2021.9711851
2021-09-29
Abstract:Micro-electro-mechanical systems (MEMS) often require thick structures with high aspect ratios. To fulfill this specification, lamination of thick dry film photoresists (DFR) is preferred. To demonstrate the capability, we developed a microfluidic system, which consists of a 3-level laminated SUEX DFR with an aperture and served as a hydrodynamic trap. Two embedded vertically arranged electrodes around the aperture enabled electrical impedance spectroscopy (EIS) on single microspheres. In a proof-of-concept, EIS measurements were carried out between 500 Hz and 1 MHz on a single poly(methyl methacrylate) (PMMA) sphere with a diameter of $100\ \mu \mathrm{m}$. The spectra were analyzed using an equivalent electric circuit model. A significant increase in impedance values was obtained by trapping the PMMA sphere in the aperture.
Materials Science,Physics,Engineering
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