Development of Ti/Au Transition-Edge Sensors for Single-Photon Detection

Xiaolong Xu,Xiaoying Sun,Jian Chen,Mauro Rajteri,Hobey Garrone,Carlo Pepe,Wan Li,Jinjin Li,Mingyu Zhang,Tianjia Bu,Ying Gao,Tianbao Sun,Xueshen Wang
DOI: https://doi.org/10.1109/tasc.2024.3350569
IF: 1.9489
2024-05-01
IEEE Transactions on Applied Superconductivity
Abstract:Transition-edge sensors (TESs) have shown remarkable energy resolution and photon-number resolving ability. In this paper, we report the fabrication and characterization of TiAu optical TESs for the detection of single photon at the telecommunication wavelength 1550 nm. A SiO2SiNx antireflection coating is deposited on top of TESs by an inductively coupled plasma-assisted plasma-enhanced chemical vapor deposition (ICP-PECVD) process to improve the detection efficiency. TiAu (5060 nm) TES with a small sensitive area 10 m 10 m shows an energy resolution of 0.12 eV. The TES with a large sensitive area 20 m 20 m can discriminate up to 55 incident photons and the detection efficiency is 46.
physics, applied,engineering, electrical & electronic
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