Schottky Barrier Height Modulation of Zr/p-Diamond Schottky Contact by Inserting Ultrathin Atomic Layer-Deposited Al 2 O 3

Juan Wang,Guoqing Shao,Genqiang Chen,Xiuliang Yan,Qi Li,Wangzhen Song,Yanfeng Wang,Zhangcheng Liu,Shuwei Fan,Chaoyang Zhang,Hong-Xing Wang
DOI: https://doi.org/10.1109/ted.2021.3117897
IF: 3.1
2021-12-01
IEEE Transactions on Electron Devices
Abstract:We fabricated Zr/p-diamond Schottky barrier diodes (SBDs) with and without a ultrathin atomic layer-deposited Al<sub>2</sub>O<sub>3</sub> interlayer. The effects of the Al<sub>2</sub>O<sub>3</sub> interlayer on the electrical properties of devices were investigated using the current–voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.799ex" height="2.343ex" style="vertical-align: -0.505ex;" viewBox="0 -791.3 2496.9 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use> <use xlink:href="#MJMAIN-2212" x="726" y="0"></use> <use xlink:href="#MJMATHI-56" x="1727" y="0"></use></g></svg></span> ) and capacitance–voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="6.394ex" height="2.343ex" style="vertical-align: -0.505ex;" viewBox="0 -791.3 2752.9 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-43" x="0" y="0"></use> <use xlink:href="#MJMAIN-2212" x="982" y="0"></use> <use xlink:href="#MJMATHI-56" x="1983" y="0"></use></g></svg></span> ) characteristics at room temperature. Compared with Zr/p-diamond SBDs without the interlayer, SBDs with a 2-nm-thick Al<sub>2</sub>O<sub>3</sub> interlayer exhibited higher Schottky barrier height and breakdown voltage. The insertion of the Al<sub>2</sub>O<sub>3</sub> layer effectively reduced the interface state and it is considered that the barrier enhancement is attributed to the significant reduction of interface state density. This work provides a simple method to passivate the diamond surface and modulate the barrier heights of diamond SBDs.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-49" d="M43 1Q26 1 26 10Q26 12 29 24Q34 43 39 45Q42 46 54 46H60Q120 46 136 53Q137 53 138 54Q143 56 149 77T198 273Q210 318 216 344Q286 624 286 626Q284 630 284 631Q274 637 213 637H193Q184 643 189 662Q193 677 195 680T209 683H213Q285 681 359 681Q481 681 487 683H497Q504 676 504 672T501 655T494 639Q491 637 471 637Q440 637 407 634Q393 631 388 623Q381 609 337 432Q326 385 315 341Q245 65 245 59Q245 52 255 50T307 46H339Q345 38 345 37T342 19Q338 6 332 0H316Q279 2 179 2Q143 2 113 2T65 2T43 1Z"></path><path stroke-width="1" id="MJMAIN-2212" d="M84 237T84 250T98 270H679Q694 262 694 250T679 230H98Q84 237 84 250Z"></path><path stroke-width="1" id="MJMATHI-56" d="M52 648Q52 670 65 683H76Q118 680 181 680Q299 680 320 683H330Q336 677 336 674T334 656Q329 641 325 637H304Q282 635 274 635Q245 630 242 620Q242 618 271 369T301 118L374 235Q447 352 520 471T595 594Q599 601 599 609Q599 633 555 637Q537 637 537 648Q537 649 539 661Q542 675 545 679T558 683Q560 683 570 683T604 682T668 681Q737 681 755 683H762Q769 676 769 672Q769 655 760 640Q757 637 743 637Q730 636 719 635T698 630T682 623T670 615T660 608T652 599T645 592L452 282Q272 -9 266 -16Q263 -18 259 -21L241 -22H234Q216 -22 216 -15Q213 -9 177 305Q139 623 138 626Q133 637 76 637H59Q52 642 52 648Z"></path><path stroke-width="1" id="MJMATHI-43" d="M50 252Q50 367 117 473T286 641T490 704Q580 704 633 653Q642 643 648 636T656 626L657 623Q660 623 684 649Q691 655 699 663T715 679T725 690L740 705H746Q760 705 760 698Q760 694 728 561Q692 422 692 421Q690 416 687 415T669 413H653Q647 419 647 422Q647 423 648 429T650 449T651 481Q651 552 619 605T510 659Q484 659 454 652T382 628T299 572T226 479Q194 422 175 346T156 222Q156 108 232 58Q280 24 350 24Q441 24 512 92T606 240Q610 253 612 255T628 257Q648 257 648 248Q648 243 647 239Q618 132 523 55T319 -22Q206 -22 128 53T50 252Z"></path></defs></svg>
engineering, electrical & electronic,physics, applied
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